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    "Flow Sensor"

    Abstract: FMAL001D
    Text: FMA Series Mass flow sensors for gases FEATURES • Ranges 0.1000 sccm1 and 0.6 slpm2 · Actual mass flow sensing · 1.5 V output · Manifold mount/O-ring sealed · Sensortechnics PRO services MEDIA COMPATIBILITY To be used with dry gases only The FMA series is NOT designed for liquid


    Original     		PDF FMAL001DU FMAL006DU "Flow Sensor" FMAL001D