DSA00495366.pdf by Infineon Technologies

Partial File Text Embedded DRAMs und ihre Anwendung Dr.-Ing. Jörg Schönfeld, Siemens AG, HL DC PE MC, Postfach 80 17 09, D-81617 München email: joerg.schoenfeld@hl.siemens.de 1. Abstract 3. Stand der Technik
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DRAM "deep trench" capacitor