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    Abstract: AR237J PAR710 D9000 ellipsometer photoresist
    Text: 193nm CD shrinkage under SEM: modeling the mechanism Andrew Habermas1, Dongsung Hong1, Matthew Ross2, William Livesay2 Cypress Semiconductor, 2401 East 86th St, Bloomington, MN 55425 2 Electron Vision Corp., 10119 Carroll Canyon Road, San Diego, CA 92131-1109l


    Original     		PDF 193nm 92131-1109l 248nm sartorius AR237J PAR710 D9000 ellipsometer photoresist